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Home > Products and Services > Microelectromechanical Systems (MEMS)
Microelectromechanical Systems (MEMS)
 

For application areas in primarily telecommunications, bio-MEMS, opto-MEMS, sensors and actuators, CMC provides the following products and services:

  • Design environment: CAD tools and methodologies from leading microsystems vendors provide researchers with a complete environment for designing, modeling, analyzing, and simulating
    MEMS designs
  • Prototype manufacturing services including:
    • Triple poly-silicon layers surface micromachining process on silicon substrate
    • LIGA-like, thick metal electroplating, surface and bulk MEMS
    • SOI-based single crystal silicon layer process on glass substrate
  • CMOS-MEMS fabrication through bulk silicon micromachining
  • Design kits (technology files) for MEMS manufacturing processes
  • Training materials on supported CAD tools and manufacturing technologies
  • Test equipment (probe stations,
    spectrum analyzers, etc.)
  • Engineering support
 
 

Further Information :

 

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Dr. Chiao, Mechanical Engineering, University of British Columbia; Dr. Harvey Lui, Dermatology, University of British Columbia; and Dr. Haishan Zeng, British Columbia Cancer Agency collaborated on the development of a MEMS-based optical scanner that can be used in several clinical applications, including endoscopic imaging and spectroscopy of internal organs. The team, which included graduate students such as Chin Pang (Billy) Siu (pictured here) relied on products and services offered by CMC Microsystems to manufacture a working prototype of the device.

 


 

 

 

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Last Revised: November 9, 2009