Microsystems are a rapidly growing field, embracing developments in areas such as microelectronics, photonics, mechanics, chemistry, biology and medicine. The definition of microsystems adopted by the European Commission Fourth Framework IT program (1996) states that microsystems are integrated, intelligent miniaturized devices and systems fabricated using processes compatible with semiconductor ICs, and combining sensing with computation and actuation.� These would normally combine two or more of the following system types: electrical, mechanical, optical, chemical, biological, magnetic, or other, within a single or multi-chip integrated system.

Microsystems are...

• Tiny electrical and mechanical devices that are small enough to fit on the head of a pin
• Include MEMS, microfluidics, photonics, nanotechnology and microelectronics
• Sense and manipulate their environment

…All around us: 

• Pacemakers: helping the heart beat
• Airbags: deploying airbags when a crash occurs
• Video games: detecting game controller motion
• Diagnostic devices: identifying and analyzing genetic materials
• Fuel cells: converting chemicals into water and, in the process, producing clean electricity
• Cell phones: processing signals and connect us to the world
• Hearing aids: detecting, processing and transmitting sounds
• Water quality systems: detecting pathogens in drinking water
• Airplanes: helping a pilot take-off, fly and land a plane safely